@book{27111,
	author = {Dubowski, Jan, ed.},
	title = {Laser Applications in Microelectronic and Optoelectronic Manufacturing III},
	publisher = {SPIE},
	year = {1998},
	series = {Proceedings of SPIE; V. 3274},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3274}
}