Dubowski, Jan, ed. <br/><br/>
Laser Applications in Microelectronic and Optoelectronic Manufacturing II  [eBook] 

 - Washington, USA  SPIE  1997 
 - Online resource 
 - Proceedings of SPIE; V. 2991 .
<br/><br/><label>ISBN: </label>9780819424020 (Print)