TY  - BOOK
AU  - Xu, Xianfan, ed.
TI  - Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII
T2  - Proceedings of SPIE; V. 8607
SN  - 9780819493767 (Print)
PY  - 2013///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8607
ER  -