Xu, Xianfan, ed. <br/><br/>
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII  [eBook] 

 - Washington, USA  SPIE  2013 
 - Online resource 
 - Proceedings of SPIE; V. 8607 .
<br/><br/><label>ISBN: </label>9780819493767 (Print)