TY  - BOOK
AU  - Hennig, Guido, ed.
TI  - Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII
T2  - Proceedings of SPIE; V. 8243
SN  - 9780819488862 (Print)
PY  - 2012///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8243
ER  -