@book{27102,
	author = {Hennig, Guido, ed.},
	title = {Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII},
	publisher = {SPIE},
	year = {2012},
	series = {Proceedings of SPIE; V. 8243},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8243}
}