TY  - BOOK
AU  - Gu, Bo, ed.
TI  - Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI
T2  - Proceedings of SPIE; V. 7920
SN  - 9780819484574 (Print)
PY  - 2011///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7920
ER  -