00538nam a2200145Ia 4500003000900000008004100009020002600050040001600076100001600092245009600108260003200204300002000236490003300256856010300289IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819484574 (Print)  cIIA Library  aGu, Bo, ed. 0aLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIh[eBook]  aWashington, USAbSPIEc2011  aOnline resource  aProceedings of SPIE; V. 7920  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7920yClick Here to Access eBook