00777nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003200092245009600124260003200220300002000252490003300272856010300305942000700408999001700415952016300432IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819498809 (Print)  cIIA Library  aNakata, Yoshiki, ed.944605 0aLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIXh[eBook]  aWashington, USAbSPIEc2014  aOnline resource  aProceedings of SPIE; V. 8967  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8967yClick Here to Access eBook  cEB  c27100d27100  00104070aBANbBANd2011-07-01eSPIEhV. 8967l0pEB6560r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8967w2021-11-05yEB