TY  - BOOK
AU  - Nakata, Yoshiki, ed.
TI  - Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX
T2  - Proceedings of SPIE; V. 8967
SN  - 9780819498809 (Print)
PY  - 2014///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8967
ER  -