Nakata, Yoshiki, ed. <br/><br/>
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX  [eBook] 

 - Washington, USA  SPIE  2014 
 - Online resource 
 - Proceedings of SPIE; V. 8967 .
<br/><br/><label>ISBN: </label>9780819498809 (Print)