@book{27100,
	author = {Nakata, Yoshiki, ed.},
	title = {Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX},
	publisher = {SPIE},
	year = {2014},
	series = {Proceedings of SPIE; V. 8967},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8967}
}