TY  - BOOK
AU  - Lukichev, Vladimir, ed.
TI  - International Conference on Micro- and Nano-Electronics 2018
T2  - Proceedings of SPIE; V. 11022
SN  - 9781510627093 (Print)
PY  - 2019///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11022
ER  -