00569nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002800119245007400147260003200221300002000253490003400273856010400307IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510627093 (Print)  a9781510627109 (Online)  cIIA Library  aLukichev, Vladimir, ed. 0aInternational Conference on Micro- and Nano-Electronics 2018h[eBook]  aWashington, USAbSPIEc2019  aOnline resource  aProceedings of SPIE; V. 11022  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/11022yClick Here to Access eBook