Lukichev, Vladimir, ed. <br/><br/>
International Conference on Micro- and Nano-Electronics 2018  [eBook] 

 - Washington, USA  SPIE  2019 
 - Online resource 
 - Proceedings of SPIE; V. 11022 .
<br/><br/><label>ISBN: </label>9781510627093 (Print) 9781510627109 (Online)