@book{26889,
	author = {Lukichev, Vladimir, ed.},
	title = {International Conference on Micro- and Nano-Electronics 2018},
	publisher = {SPIE},
	year = {2019},
	series = {Proceedings of SPIE; V. 11022},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11022}
}