00801nam a2200193Ia 4500003000900000008004100009020002600050020002700076040001600103100003500119245007400154260003200228300002000260490003400280856010400314942000700418999001700425952016500442IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510609495 (Print)  a9781510609501 (Online)  cIIA Library  aLukichev, Vladimir, ed.944446 0aInternational Conference on Micro- and Nano-Electronics 2016h[eBook]  aWashington, USAbSPIEc2017  aOnline resource  aProceedings of SPIE; V. 10224  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10224yClick Here to Access eBook  cEB  c26888d26888  00104070aBANbBANd2011-07-01eSPIEhV. 10224l0pEB6348r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10224w2021-11-05yEB