TY  - BOOK
AU  - Lukichev, Vladimir, ed.
TI  - International Conference on Micro- and Nano-Electronics 2016
T2  - Proceedings of SPIE; V. 10224
SN  - 9781510609495 (Print)
PY  - 2017///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10224
ER  -