@book{26888,
	author = {Lukichev, Vladimir, ed.},
	title = {International Conference on Micro- and Nano-Electronics 2016},
	publisher = {SPIE},
	year = {2017},
	series = {Proceedings of SPIE; V. 10224},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10224}
}