TY  - BOOK
AU  - Orlikovskiy, Aleksandr, ed.
TI  - International Conference on Micro- and Nano-Electronics 2014
T2  - Proceedings of SPIE; V. 9440
SN  - 9781628415551 (Print)
PY  - 2014///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9440
ER  -