@book{26887,
	author = {Orlikovskiy, Aleksandr, ed.},
	title = {International Conference on Micro- and Nano-Electronics 2014},
	publisher = {SPIE},
	year = {2014},
	series = {Proceedings of SPIE; V. 9440},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9440}
}