00753nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003000092245007400122260003200196300002000228490003300248856010300281942000700384999001700391952016300408IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819479112 (Print)  cIIA Library  aValiev, Kamil, ed.944444 0aInternational Conference on Micro- and Nano-Electronics 2009h[eBook]  aWashington, USAbSPIEc2010  aOnline resource  aProceedings of SPIE; V. 7521  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7521yClick Here to Access eBook  cEB  c26886d26886  00104070aBANbBANd2011-07-01eSPIEhV. 7521l0pEB6346r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7521w2021-11-05yEB