00523nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002300092245007400115260003200189300002000221490003300241856010300274IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819479112 (Print)  cIIA Library  aValiev, Kamil, ed. 0aInternational Conference on Micro- and Nano-Electronics 2009h[eBook]  aWashington, USAbSPIEc2010  aOnline resource  aProceedings of SPIE; V. 7521  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7521yClick Here to Access eBook