00518nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002500092245006700117260003200184300002000216490003300236856010300269IN-BaIIA211028s9999 xx s 000 0 eng d a9780819428592 (Print) cIIA Library aRastogi, Pramod, ed. 0aInternational Conference on Applied Optical Metrologyh[eBook] aWashington, USAbSPIEc1998 aOnline resource aProceedings of SPIE; V. 3407 uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3407yClick Here to Access eBook