00515nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002300092245006600115260003200181300002000213490003300233856010300266IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819409492 (Print)  cIIA Library  aCreath, Kathy, ed. 0aInterferometry: Surface Characterization and Testingh[eBook]  aWashington, USAbSPIEc1992  aOnline resource  aProceedings of SPIE; V. 1776  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1776yClick Here to Access eBook