00586nam a2200157Ia 4500003000900000008004100009020002600050020002700076040001600103100002100119245009800140260003200238300002000270490003400290856010400324IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510635005 (Print)  a9781510635012 (Online)  cIIA Library  aBaets, Roel, ed. 0aIntegrated Photonics Platforms: Fundamental Research, Manufacturing and Applicationsh[eBook]  aWashington, USAbSPIEc2020  aOnline resource  aProceedings of SPIE; V. 11364  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/11364yClick Here to Access eBook