00521nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002800092245006500120260003400185300002000219490003300239856010300272IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819447395 (Print)  cIIA Library  aRighini, Giancarlo, ed. 0aIntegrated Optical Devices: Fabrication and Testingh[eBook]  aWashington, USAbSPIEc2003    aOnline resource  aProceedings of SPIE; V. 4944  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4944yClick Here to Access eBook