TY  - BOOK
AU  - Hoy Bennett, Marylyn, ed.
TI  - Integrated Circuit Metrology, Inspection, and Process Control VIII
T2  - Proceedings of SPIE; V. 2196
SN  - 9780819414915 (Print)
PY  - 1994///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2196
ER  -