00536nam a2200145Ia 4500003000900000008004100009020002600050040001600076100003000092245008000122260003200202300002000234490003300254856010300287IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819414915 (Print)  cIIA Library  aHoy Bennett, Marylyn, ed. 0aIntegrated Circuit Metrology, Inspection, and Process Control VIIIh[eBook]  aWashington, USAbSPIEc1994  aOnline resource  aProceedings of SPIE; V. 2196  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/2196yClick Here to Access eBook