@book{26658,
	author = {Hoy Bennett, Marylyn, ed.},
	title = {Integrated Circuit Metrology, Inspection, and Process Control VIII},
	publisher = {SPIE},
	year = {1994},
	series = {Proceedings of SPIE; V. 2196},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2196}
}