00530nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002500092245007900117260003200196300002000228490003300248856010300281IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819411600 (Print)  cIIA Library  aPostek, Michael, ed. 0aIntegrated Circuit Metrology, Inspection, and Process Control VIIh[eBook]  aWashington, USAbSPIEc1993  aOnline resource  aProceedings of SPIE; V. 1926  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1926yClick Here to Access eBook