TY  - BOOK
AU  - Postek, Michael, ed.
TI  - Integrated Circuit Metrology, Inspection, and Process Control VI
T2  - Proceedings of SPIE; V. 1673
SN  - 9780819408280 (Print)
PY  - 1992///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1673
ER  -