00529nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002500092245007800117260003200195300002000227490003300247856010300280IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819408280 (Print)  cIIA Library  aPostek, Michael, ed. 0aIntegrated Circuit Metrology, Inspection, and Process Control VIh[eBook]  aWashington, USAbSPIEc1992  aOnline resource  aProceedings of SPIE; V. 1673  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1673yClick Here to Access eBook