00758nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003200092245007700124260003200201300002000233490003300253856010300286942000700389999001700396952016300413IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819405630 (Print)  cIIA Library  aArnold, William, ed.944320 0aIntegrated Circuit Metrology, Inspection, and Process Control Vh[eBook]  aWashington, USAbSPIEc1991  aOnline resource  aProceedings of SPIE; V. 1464  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1464yClick Here to Access eBook  cEB  c26655d26655  00104070aBANbBANd2011-07-01eSPIEhV. 1464l0pEB6115r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1464w2021-11-05yEB