@book{26655,
	author = {Arnold, William, ed.},
	title = {Integrated Circuit Metrology, Inspection, and Process Control V},
	publisher = {SPIE},
	year = {1991},
	series = {Proceedings of SPIE; V. 1464},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1464}
}