00534nam a2200145Ia 4500003000900000008004100009020002600050040001600076100003000092245007800122260003200200300002000232490003300252856010300285IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819417879 (Print)  cIIA Library  aHoy Bennett, Marylyn, ed. 0aIntegrated Circuit Metrology, Inspection, and Process Control IXh[eBook]  aWashington, USAbSPIEc1995  aOnline resource  aProceedings of SPIE; V. 2439  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/2439yClick Here to Access eBook