Hoy Bennett, Marylyn, ed. <br/><br/>
Integrated Circuit Metrology, Inspection, and Process Control IX  [eBook] 

 - Washington, USA  SPIE  1995 
 - Online resource 
 - Proceedings of SPIE; V. 2439 .
<br/><br/><label>ISBN: </label>9780819417879 (Print)