@book{26654,
	author = {Hoy Bennett, Marylyn, ed.},
	title = {Integrated Circuit Metrology, Inspection, and Process Control IX},
	publisher = {SPIE},
	year = {1995},
	series = {Proceedings of SPIE; V. 2439},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2439}
}