TY  - BOOK
AU  - Arnold, William, ed.
TI  - Integrated Circuit Metrology, Inspection, and Process Control IV
T2  - Proceedings of SPIE; V. 1261
SN  - 9780819403087 (Print)
PY  - 1990///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1261
ER  -