00529nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002500092245007800117260003200195300002000227490003300247856010300280IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819403087 (Print)  cIIA Library  aArnold, William, ed. 0aIntegrated Circuit Metrology, Inspection, and Process Control IVh[eBook]  aWashington, USAbSPIEc1990  aOnline resource  aProceedings of SPIE; V. 1261  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1261yClick Here to Access eBook