TY  - BOOK
AU  - Monahan, Kevin, ed.
TI  - Integrated Circuit Metrology, Inspection, and Process Control III
T2  - Proceedings of SPIE; V. 1087
SN  - 9780819401229 (Print)
PY  - 1989///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1087
ER  -