@book{26652,
	author = {Monahan, Kevin, ed.},
	title = {Integrated Circuit Metrology, Inspection, and Process Control III},
	publisher = {SPIE},
	year = {1989},
	series = {Proceedings of SPIE; V. 1087},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1087}
}