00757nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003100092245007800123260003200201300002000233490003300253856010300286942000700389999001700396952016200413IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892529568 (Print)  cIIA Library  aMonahan, Kevin, ed.943699 0aIntegrated Circuit Metrology, Inspection, and Process Control IIh[eBook]  aWashington, USAbSPIEc1988  aOnline resource  aProceedings of SPIE; V. 0921  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0921yClick Here to Access eBook  cEB  c26651d26651  00104070aBANbBANd2011-07-01eSPIEhV. 921l0pEB6111r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0921w2021-11-05yEB