TY  - BOOK
AU  - Monahan, Kevin, ed.
TI  - Integrated Circuit Metrology, Inspection, and Process Control II
T2  - Proceedings of SPIE; V. 0921
SN  - 9780892529568 (Print)
PY  - 1988///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0921
ER  -