00752nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003100092245007300123260003200196300002000228490003300248856010300281942000700384999001700391952016200408IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892528103 (Print)  cIIA Library  aMonahan, Kevin, ed.943699 0aIntegrated Circuit Metrology, Inspection, & Process Controlh[eBook]  aWashington, USAbSPIEc1987  aOnline resource  aProceedings of SPIE; V. 0775  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0775yClick Here to Access eBook  cEB  c26650d26650  00104070aBANbBANd2011-07-01eSPIEhV. 775l0pEB6110r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0775w2021-11-05yEB