TY  - BOOK
AU  - Monahan, Kevin, ed.
TI  - Integrated Circuit Metrology, Inspection, & Process Control
T2  - Proceedings of SPIE; V. 0775
SN  - 9780892528103 (Print)
PY  - 1987///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0775
ER  -