TY  - BOOK
AU  - Nyyssonen, Diana, ed.
TI  - Integrated Circuit Metrology II
T2  - Proceedings of SPIE; V. 0480
SN  - 9780892525157 (Print)
PY  - 1984///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0480
ER  -