00725nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003300092245004400125260003200169300002000201490003300221856010300254942000700357999001700364952016200381IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892523771 (Print)  cIIA Library  aNyyssonen, Diana, ed.944316 0aIntegrated Circuit Metrology Ih[eBook]  aWashington, USAbSPIEc1982  aOnline resource  aProceedings of SPIE; V. 0342  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0342yClick Here to Access eBook  cEB  c26648d26648  00104070aBANbBANd2011-07-01eSPIEhV. 342l0pEB6108r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0342w2021-11-05yEB