TY  - BOOK
AU  - Nyyssonen, Diana, ed.
TI  - Integrated Circuit Metrology I
T2  - Proceedings of SPIE; V. 0342
SN  - 9780892523771 (Print)
PY  - 1982///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0342
ER  -