@book{26648,
	author = {Nyyssonen, Diana, ed.},
	title = {Integrated Circuit Metrology I},
	publisher = {SPIE},
	year = {1982},
	series = {Proceedings of SPIE; V. 0342},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0342}
}